Festo's clean room-compliant pneumatic products have been certified for maximum safety in accordance with the standardised criteria of VDI Guideline 2083-9.1. And, almost all them are suitable for category 7 clean rooms in line with ISO 14644-1.
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| Type | Function / Features | Cleanroom |
|
|---|---|---|---|
| ADVU-RR-SA | Compact cylinder | ISO 4 (FS209E class10) |
|
| ADN-RR-SA | Standard cylinder | ISO 4 (FS209E class10) |
|
| CDN-RR-SA | ISO standard, double acting cylinder |
ISO 4 (FS209E class10) |
|
| DRQD-RR | Rotary actuator with spigot and flange |
ISO 4 (FS209E class10) |
|
| DSNU-RR-SA | ISO standard, double acting cylinder |
ISO 4 (FS209E class10) |
|
| DFM-RR-SA | Guided drives | ISO 4 (FS209E class10) |
|
| HGPP-RR-SA | Precision parallel gripper | ISO 4 (FS209E class10) |
|
| HGPT-RR-SA | T-slot parallel gripper | ISO 4 (FS209E class10) |
|
| SME-RR | Proximity sensor for cylinders |
ISO 4 (FS209E class10) |
|
| DGPL-KF-RR-SA | Double acting linear, rodless cylinder |
ISO 4 or 5 (FS209E class10 or 100) |
|
| DGC-KF-RR-SA | Double acting linear, rodless cylinder |
ISO 5 (FS209E class100) |
|
| EV-RR | Single acting clamping module |
ISO 5 (FS209E class100) |
|
| DRQD-J20-RR | Mini rotary actuator with spigot and flange |
ISO 5 (FS209E class100) |
|
| DNC-RR-SA | ISO standard, double acting cylinder |
ISO 5 (FS209E class100) |
|
| SLT-RR-SA | Mini slide | ISO 5 (FS209E class100) |
|
| CLR-RR-SA | Linear / Swivel clamp | ISO 5 (FS209E class100) |
|
| DGE-ZR-RR-SA | Electromechanical axis Tooth belt drives |
ISO 4 or 5 (FS209E class10 or 100) |
|
| DGE-SP-RR-SA | Electromechanical axis Spindle drives |
ISO 4 or 5 (FS209E class10 or 100) |
|
| MAS-RR | Tensile actuator | ISO 4 (FS209E class10) |
|
| MH1-RR | In-line / Sub-base valve (single solenoid / individual connection / manifold mounting) |
ISO 4 (FS209E class10) |
|
| MHE2-RR | Individual valve (single solenoid / individual / connection manifold mounting) |
ISO 4 (FS209E class10) |
|
| CPA-SC-RR | Single / Double solenoid | ISO 4 (FS209E class10) |
|
| CPE-RR | Single / Double solenoid / Individual connection |
ISO 5 (FS209E class100) |
|
| CDVI-RR | Single / Double solenoid | ISO 5 (FS209E class100) |
|
| GRLA-RR | Throttle out with check valve | ISO 4 (FS209E class10) |
|
| GR-RR | In-line | ISO 4 (FS209E class10) |
|
| LF-RR | 5.0 μm | ISO 4 (FS209E class10) |
|
| LFM-RR | 0.01μm / 1.0 μm (combine both sizes) |
ISO 4 (FS209E class10) |
|
| HE-RR | Twist knob for on/off / / Lockable |
ISO 4 (FS209E class10) |
|
| LRP-RR | With diaphragm pilot control | ISO 4 (FS209E class10) |
|
| LR-RR | Locking at the rotary knob | ISO 4 (FS209E class10) |
|
| FR-RR | With or Without check valve | ISO 4 (FS209E class10) |
|
| LFR-RR | Locking at the rotary knob / Turn knob to adjust pressure |
ISO 5 (FS209E class100) |
|
| CRVZS-RR | Capacity: 0.1l / 0.4l / 0.75l / 2.0l / 5.0l / 10.0l |
ISO 4 (FS209E class10) |
|
| PUN-RR | Type: 3 / 4 / 6 / 8 / 10 | ISO 4 (FS209E class10) |
|
| QS-F-RR | Push in fitting range, O.D. of tube calibrated |
ISO 4 (FS209E class10) |
|
| CK-RR | Quick connector range, I.D. of tube calibrated |
ISO 4 (FS209E class10) |
|
| OL-RR | O-ring for sealing connection | ISO 4 (FS209E class10) |
|
| SDE5-RR | Pressure switch / Vacuum switch |
ISO 4 (FS209E class10) |
|
| VN-RR | High vacuum / High suction volume flow |
ISO 4 (FS209E class10) |
|
| DNCE-RR-SA | Electrical cylinder | ISO 4 (FS209E class10) |
|
| NPQP-RR | Push-in fittings | ISO 4 (FS209E class10) |
|
| Cleanroom Catalogue | ISO Class 6 (FS209E class 1000) | ||
| Information |