Products for the semiconductor and electronics industry

Strengthening competitiveness, minimising costs

For anyone considering the total costs of a system, Festo technology is a must. Festo thinks in the same technological and economic dimensions as the semiconductor and electronics industry. For example, by combining optimum product quality with comprehensive services.

Selected standard products, ideally suited for the semiconductor and electronics industry

Compact flat cylinders EZH from Festo

Flat cylinders EZH

Extremely flat design, protection against rotation through special piston form, compact assembly for block mounting, versatile mounting options. Extremely slim with a width of just 1.5 - 10mm. 40% less fitting space than round cylinders.
Piston area 1.5/6.5 ... 5/20mm. Stroke length 10 … 50 mm.

 

EZH in the catalogue

Compact cartridge cylinders EGZ from Festo

Compact cartridge cylinders EGZ

Simply screw in. From 6mm diameter, single acting. Ideal for handling tasks. Stroke end position adjustable due to variable screw-in depth. Diameter 6 ... 16mm, stroke length 5 ... 15mm.    

 

EGZ in the catalogue

Miniature cylinders EG-PK from Festo

Miniature cylinders EG-PK

The smallest round cylinder. For exceptionally delicate applications with high installation density. From a diameter of 2.5 mm, single-acting. Low mass of 2 to 20g.

Piston diameter 2.5 ... 6mm, stroke length 5 ... 25mm.

 

Miniature cylinders in the catalogue

Magnetically coupled linear drive DGO from Festo

Linear drive DGO in compact design

Compact performance for long strokes: Magnetic power transmission, double acting. No mechanical connection. Pressure tight and leak-free system, no ingress of contamination and dust possible. Space-saving installation with long strokes.
Diameter 12 ... 40mm stroke length 10 ... 4,000mm.

 

DGO in the catalogue

Vacuum generators from Festo

Vacuum generators N/VAD/VADMI

Inline vacuum generators VN and multifunctional vacuum generators VADM . For maximum durability and functionality. Decentralised vacuum generation, various performance classes, numerous functions - e.g. VADMI with ejector pulse, air saving function and control signal. Complies with ISO clean room class 4.

 

VN in the catalogue

VAD, VADMI in the catalogue

Clean room standards

There are a range of international standards for clean rooms. More information can be found in the

 clean room standards comparison table!