Innovative pneumatics in electronics
Smaller, more accurate, more compact and more powerful...
The trend towards miniaturisation creates demanding requirements for pneumatic components in electronics.
Whether it is for light assembly, the semiconductor industry or the manufacture of electronic devices - Festo has developed a special pioneering range of cylinders, valves, controllers and accessories and can thus offer maximum performance in minimum space.
Pneumatics in the semiconductor industry
Front end and back end
The semiconductor industry is divided into front end (wafer processing) and back end (testing, assembly, packaging). For the front end segment, Festo supplies a wide selection of pneumatic aluminium and stainless steel cylinders and various valve types. These valves are used to actuate the cylinders and for pilot control of gas valves. In the back end segment the focus is on miniaturisation of pneumatic drives and valves. In particular, the mini slides from Festo are highly flexible due to their versatile direct mounting and connection options. The Smart Cubic valve series offers the appropriate valves for the semiconductor industry with minimal fitting space.
Easy to keep clean
Particularly in the semiconductor industry, many of the production steps have to be carried out under clean room conditions. The more sensitive the production of a product, the cleaner the production method needs to be.
Tested to VDI
Many factors influence cleanliness
The cleanliness of a clean room system depends on various factors, including air quality, air flow, surface quality, staff and equipment.
Examples of equipment include pneumatic drives and valves, which make a significant contribution to the environmental impact of the production plant. Festo has responded to these requirements by developing a special range of products suitable for use in clean rooms. These products are qualified in compliance with the German VDI guidelines 2083 on suitability of equipment for clean room use.