• Products
  • Downloads
  • Diagrams

High-precision and dynamic pressure control in even the smallest spaces

The new VTEP proportional valve terminal expands the Controlled Pneumatics product portfolio. It boasts an impressive and extremely compact multi-channel pressure control with a low flow rate. Up to 5 valves with 10 working channels can be controlled in parallel with pressure and vacuum. VTEP is free of copper, nickel and zinc, making it ideal for many industries such as electronics and semiconductors, life science, textiles and battery production.

Perfect for many applications

Highly precise, force-controlled polishing

The variable contact pressure of the individual polishing chambers on the polisher is controlled highly precisely and ensures excellent polishing results – even when polishing wafers with VTEP.

VTEP application: High-precision, force-controlled polishing

Best control for dancer rollers

From small to very large web controls: Perfect adjustments in the event of unexpected forces, leading to improved process reliability. VTEP is suitable for the web control of battery foils, for example.

VTEP application: Best control for dancer rollers

Pilot valve for process automation

Valves such as VTEP also serve as pilot valves for media valves. In photolithography, for example, wafers have to be sealed very precisely with a light-resistant coating. A reverse suction function ensures that no excess paint can escape.

VTEP application: Pilot valve for process automation

Dispensing, dosing or pumping via pressure or vacuum

With VTEP, applications such as patch clamping can be achieved using pressure and vacuum. Paint, adhesives or liquids for testing and analysis can also be dispensed with high precision and according to individual recipes. That is not possible with either electric automation or standard pneumatics.

VTEP application: Dispensing, dosing or pumping via pressure or vacuum