Safely actuate gas valves in coating processes
Valve terminal VTOC
- Special valve terminal for use as a pilot valve
- 2-channel control of media valves via all conventional bus systems avoids maloperations
- Built-in fibre-optic cable system for maximum process reliability
Like floating on air: contactless and gentle transport of workpieces
Air bearing ATBT
- Uniform load bearing capacity over the entire air cushion plate for increased process reliability
- Non-contacting transport on wafer-thin air cushions with minimal air consumption
- Individual components or as a rail, available in customised lengths
Fast and safe transport of glass plates in high vacuum
Sliding fork telescopic handling system
- Stable even at weights over 10 kg
- Suitable for high temperatures = low-cost alternative to clean room robots
- Special glass supports prevent marks on the glass plates.
- Installation space = workpiece size
- Jerk-free and precise movements up to 2,100 mm with electric spindle drive
Fast and safe conveyance of wafers and solar cells
H-gantry with Bernoulli gripper OGGB
The high-speed H-gantry EXCM is fast, precise and compact.
The sensitive wafers are gently transported in combination with the Bernoulli gripper OGGB for low-contact gripping.
This process is extremely safe and is economic in its compressed air consumption.
More about the H-gantry