Wafer production and front-end sector:
product highlights and applications

Selected products:

For wafer production

For the front-end sector 

 

Application examples:

Ready-to-install mounting plate

Wafer production: mounting plate

Correct tension when cutting the wafers

Complete with proportional valves, service units and a pressure booster: the mounting plate is easy to order, ready to install, and fully documented.

 

Our worldwide service and sales network gives you certainty and ensures high system availability.

 

Safe control of gas valves

Gas box

CVD, lithography, etching, ion implantation

In these process steps, safe switching of media valves is essential in order to avoid incorrect switching.

 

The valve terminal VTOC has 2-channel valve actuation via all conventional bus systems (Ethercat) to guarantee safe switching.

Gentle lifting systems

Lifting systems

Jerk-free positioning of the FOUPs

The harmonised drive package consisting of linear drive EGC and servo motor EMMS-AS positions accurately so the fragile wafers will not be damaged.

 

On request: customised lifting solutions with pneumatic counter balancing for large loads or solutions for the clean room

 

Process-reliable media distribution

Media distribution

CMP process

During polishing of wafer surfaces, the valve terminal CPX/MPA with diagnostic function and condition monitoring ensures greater process reliability and increased system availability.

Customised cooling water distribution

Cooling water distribution

Ready-to-install solutions

Valve terminals, angle seat valves and flow sensors: in the PVD process, customised cooling water systems ensure that the manufacturing process runs smoothly.

 

On request: piping in stainless steel or PVC

Your worldwide contacts:

Worldwide contacts

Festo industry team