Ready-to-install mounting plate
Correct tension when cutting the wafers
Complete with proportional valves, service units and a pressure booster: the mounting plate is easy to order, ready to install, and fully documented.
Our worldwide service and sales network gives you certainty and ensures high system availability.
Safe control of gas valves
CVD, lithography, etching, ion implantation
In these process steps, safe switching of media valves is essential in order to avoid incorrect switching.
The valve terminal VTOC has 2-channel valve actuation via all conventional bus systems (Ethercat) to guarantee safe switching.
Gentle lifting systems
Jerk-free positioning of the FOUPs
The harmonised drive package consisting of linear drive EGC and servo motor EMMS-AS positions accurately so the fragile wafers will not be damaged.
On request: customised lifting solutions with pneumatic counter balancing for large loads or solutions for the clean room
Process-reliable media distribution
During polishing of wafer surfaces, the valve terminal CPX/MPA with diagnostic function and condition monitoring ensures greater process reliability and increased system availability.
Customised cooling water distribution
Valve terminals, angle seat valves and flow sensors: in the PVD process, customised cooling water systems ensure that the manufacturing process runs smoothly.
On request: piping in stainless steel or PVC