Félvezetők további feldolgozása

Die attachment

Your objective: speed and precision


Our solution: the fast-switching valve MHA2 with switching cycles of less than 2 ms ensures fast application of the glue. Its low dead weight enables the vacuum pressure valve MH1 to be attached to the moving axis very close to the gripper, thus allowing fast switching between vacuum and pressure. The spindle drive EGSK is used to position the ICs precisely.

Product highlights for this process step:

    Fast-switching valve MH2 with short switching times and extremely fast response characteristics

High cycle rates and optimum process and part quality due its very good repetition accuracy

Fast-switching valve MH2 – for high speed in production

  • Switching time ≤ 2 ms makes for short cycle times and very quick response characteristics
  • Repetition accuracy ≤ 0.2 ms for exact dispensing or bonding, for example


Product information for MH2

Fast-switching valve MH2 in the catalogue 



    Vacuum valve MHA1

Ideal for installation on quickly moving system parts due to its low total weight of just 30.6 g (incl. fittings)

Vacuum valve MHA1 – weight-optimised with high flow rates

  • Extremely compact with optimised flow rate
  • Suction and blowing functions in a single valve
  • Available as a complete integration solution with a valve, sub-base, sensors and control electronics


Short product information for MHA1

Vacuum valve MHA 1 in the catalogue 



    Electric linear axes EGSK/EGSP

Designed for handling tasks or XY tables with very high precision requirments thanks to their high rigidity and repetition accuracy

Electric linear axes EGSK/EGSP

  • Available with recirculating ball bearings or with innovative caged ball bearings for high precision
  • Compact solution with integratable sensors
  • Clean-room compatible in accordance with ISO 6 (FS209E class 1000)


Short product information for EGSK

Linear axis EGSK/EGSP in the catalogue