Dispense nitrogen with piezoelectric purging systems

How you can reduce nitrogen consumption in semiconductor production

The semiconductor industry is booming and will continue to do so in the future. More and more areas of our lives are being digitalised, which is why the demand for semiconductors such as chips or chiplets is constantly on the increase. At the same time, the price pressures on producers are growing too. In the video, we show you how much nitrogen you can save and the positive impact you can have on the environment.

One way to withstand these price pressures is to significantly reduce nitrogen consumption and the energy required for production. Nitrogen is the most frequently used medium in the semiconductor manufacturing process. In large semiconductor factories, nitrogen consumption can be up to 50,000 cubic metres per hour. Nitrogen is used, among other things, to purge FOUPs and create a controlled, contamination-free environment for wafers that are transported from one machine to the next for processing.

By carefully analysing those areas in a factory where nitrogen is used, you could make considerable savings in a short amount of time. There are many opportunities to use nitrogen more effectively, especially when purging FOUPs, by dispensing it using closed loop controls. Compared to conventional valves, piezoelectric purge valves are extremely precise when dispensing and yet consume very little power. The nitrogen consumption of a large factory and the associated energy consumption and CO2 emissions can be significantly reduced with the appropriate systems.

Torsten Schulz, Head of Electronics Global Industry Segment

About the authors

Torsten Schulz
Head of Electronics Global Industry Segment
Festo SE & Co. KG

Tobias Glattbach, Electronics Global Industry Segment


Tobias Glattbach
Electronics Global Industry Segment
Festo SE & Co. KG

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