With valves VEAD and VEFC, nitrogen consumption can be reduced by up to 75% when purging FOUPs. These solutions are specially designed for applications for dispensing inert gases and offer advantages such as high dynamic response, low particle generation and a long service life.


Festo uses piezoelectric benders in these control valves in a technologically innovative way. With this technology, the valve can be controlled precisely and steplessly by applying a voltage. Piezo technology offers advantages such as high dynamic response, low particle formation and a long service life.

The use of efficient piezo technology also minimises power consumption. You can save up to 18% of your total nitrogen consumption and reduce CO2 emissions by almost 1/5.


Watch the video to find out more about how you can use these two products in your production processes to significantly reduce energy and nitrogen consumption.