Microchip inspection

Automation in the semiconductor industry

In just 18 months, the system you are building today will have to produce chips that are twice as complex as the ones you are making now, but that are still sold at the same price. This can only be achieved with automated solutions that are both reliable and economical. We are well aware of how important total system availability is for manufacturers of semiconductors and electronic components. Which products and services do you need? We are there for you – worldwide.

Application: controlling and regulating cooling circuits

Your challenge: reliably regulating the coolant in semiconductor manufacturing

The solution from Festo:

  • Valve terminals VTUG and VTOC (1) for reliably controlling pneumatic media valves
  • Valve terminal type CPX-MPA, if additional I/Os are required, for example to control electric valves, integrate sensors or create closed-loop control circuits. With this terminal, diagnostics and remote maintenance functions can also be carried out.
  • Pneumatically or electrically actuated valves type VZXA, VZQA and VZWF (3) control the media flow. Very cold and/or hot media are reliably and accurately regulated, even in closed-loop control circuits.
  • The quarter turn actuator DFPD (4) actuates ball valves VZBF (5) and butterfly valves that are typically used in main lines and feed/discharge lines for cooling or temperature control media thanks to their high flow rate performance.
  • Sensor types SFAW (2) and SPAW (6) measure the flow rate as well as the temperature and pressure of the media extremely accurately.

Products for the semiconductor industry

Festo has a broad product portfolio for machines used in the manufacture of electronic components: the valve terminal VTOC with integrated safety function or our proportional pressure regulators VEAA/VEAB for pilot control of media valves which are typically used to control or regulate process gases.

Sharing knowledge about the semiconductor industry

Why not discuss this with your specialists before deciding on Festo? Just share our recommended solutions and sample applications using this link