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  5. Semiconductor industry

Our high-quality and easily customisable automation solutions offer innovative and competitive technologies that you can use from the front-end and the back-end to advanced packaging processes such as hybrid bonding. They are optimised to minimise contamination and work reliably to maintain your yield in the long term. Thanks to their design, you can often reduce energy costs and your carbon footprint too.

Solutions that always keep your processes stable and reproducible

Our automation solutions ensure yields in semiconductor production are stable and thus economical. The smart design of our components also makes them very adaptable and scalable. This allows you to react quickly and easily to changing production requirements at any time.

These are the benefits that our automation solutions can offer you:

  • High-precision control of movement, pressure and flow rate of the media
  • Clean design for the required level of cleanliness and particle emission
  • Space-saving design for compact installation environments
  • Minimised power consumption and reduced heat generation
  • AI/IoT-ready
  • Reliable and worldwide availability thanks to local manufacture and delivery
  • Meeting the requirements of CopyExactly!
  • Personalised expert support for process-specific challenges
  • Semiconductor-specific greases and seals to prevent unwanted outgassing

Produce with repeat accuracy and control in real time using AI

Rely on our comprehensive solutions to maintain stable and reproducible processes in the long term. Thanks to our semiconductor-specific seals and greases, you also benefit from minimised outgassing for better process sequences. We can tailor our solutions to your requirements, whether for individual temperature control, micro-positioning or precise cyclical control of the gas phases in atomic layer deposition (ALD).

Here are some examples of how we can support you:

  • Temperature control for wafer chucks, process chambers or plasma generators
  • Pin lifting and micropositioning with force detection
  • Valve control for atomic layer deposition (ALD)
  • Safe purging and regeneration of vacuum chambers
  • Pilot control of UHP valves for reliably controlling process gases

The benefits to you at a glance

We know how complex the challenges are that you, as semiconductor manufacturers, face. Our customised solutions together with our in-depth practical expertise and global support network will help you meet those challenges. Our experts are always on hand to help you improve the functions of your systems and minimise downtime.

You can count on us as your perfect automation partner:

  • Extremely reliable for safe and consistent operation in all process steps
  • Rapid response in critical situations with root cause analysis using state-of-the-art technology and risk minimisation
  • Solutions with pneumatic and electric components that are not restricted to a specific technology
  • Taking CopyExactly! standards into account with own global guideline
  • Global supply chain support for smooth production processes