Orifices are the simplest form of nitrogen flow control. These are mechanical tapers (fixed drilled holes) in the tubing system through which a specific amount of nitrogen flows at constant pressure. The advantage: extremely favourable total costs, often less than €90 including installation as well as a simple switching valve and the orifice itself. This makes them ideal for adjusting simple flow rate applications for nitrogen with stable conditions.
A frequently used product in this context is the MH1 valve. This is an inexpensive standard valve which, in combination with an orifice, offers a functional, analogue solution for regulating the gas flow rate in industry. In many applications, this combination is sufficient, especially if the investment pressure is high or no digital feedback is required.
However, there are clear limits:
Please note: if you still want to record measured values at a later date, additional hardware is required (e.g. separate pressure or flow sensors and the necessary input on the controller), which increases the costs and system complexity. Despite the very long service life and reliability of simple switching valves such as the MH1, they are not ideal for processes in which cleanliness is critical. Their design means that higher particle emissions are to be expected compared to dedicated mass flow controllers.
However, many production lines continue to rely on this principle, especially when only simple volumetric flow rates need to be kept constant and appropriate filters reabsorb the particles. But as soon as dynamic adjustments, reliable monitoring or process traceability are required, this solution quickly reaches its limits.
Mass flow controllers such as VEFC, VEMD or VEAD offer methods for regulating the nitrogen flow rate that fixed orifices or adjustable throttle valves cannot.
The products themselves are not "intelligent" in that they can autonomously detect anomalies but they are AI-ready. In conjunction with filter monitoring, pressure sensors and algorithms, the degree of pollution of filters can be detected, for example, which enables timely servicing without interrupting production.
Before deciding on a specific valve, you should take a close look at the technical requirements and the application environment. Each valve has its own strengths, be it in terms of flow rate, size or connectivity.
While simple systems appear to be significantly cheaper to purchase, reliable regulators with a monitoring function offer decisive advantages:
Example: in a system with 50 regulators, a simple display on each device can help to quickly identify defective points without a digital readout.
Modern mass flow controllers provide valuable data – flow rate, pressure, temperature – which can be integrated into higher-level systems such as Festo AX. This opens up possibilities such as:
These products are not "intelligent" per se, but they are AI-ready and form the basis for future-proof, data-supported manufacturing processes.
Choosing the right valve depends on many factors:
To make tailored recommendations, we will be using an interactive tool in the near future. This will ask specific questions and then suggest the optimum solution, from a simple orifice to an AI-enabled VEFC.
Regulating nitrogen in semiconductor production is much more than a technical side issue; it influences quality, process stability and costs. The decisive factor is always what your application requires, whether that is a simple solution or state-of-the-art control technology. With the right choice, you not only ensure operational safety, but also efficiency and future viability.