Taiwan has advanced semiconductor manufacturing and a complete semiconductor ecological chain. Festo is keen to provide Taiwan semiconductor customers with advanced automation products, application technologies and solutions. In the exhibition of SEMICON Taiwan took place in Taipei from 14 to 16 September, Festo demonstrated various advanced pneumatic control technology.
This equipment reflects the application solution of Festo's gas control in the semiconductor industry N2 Purge.
In the purging system, various sensors and flow controllers cooperate to achieve system integration design, and accurate flow control is achieved through accurate proportional control of piezoelectric valve, and data is achieved through communication.
This application is aimed at the corrugated cylinder used to control Lift Pin in semiconductor equipment, to achieve accurate control and monitoring of the time, speed and accuracy of pneumatic technology in operation, and to achieve a smooth and synchronous up and down operation of the wave.
Special gas is applied to gas treatment of gas cylinder cabinet and local scrubber in facility equipment.
This equipment presents four special gas application solutions of Festo, including Auto Guard, forced supply valve (forced supply module), Shut Boy module, and various solenoid valves.
Various gases will be used in the production process of semiconductor plants.
Festo's various sensors and customized solutions can provide leakage detection solutions in the form of flow or differential pressure.
Conduct real-time monitoring to ensure the reliability of production process and quality, and also help the factory to save costs.
Festo Automation Experience (Festo AX) is an easy to use solution that allows you to extract the maximum value from the data generated by the system through artificial intelligence (AI) and machine learning to achieve predictive maintenance, predictive energy and predictive quality.
MSE6-E2M smart energy-saving module, which is the world's first and has won the Global Automation Award, monitors equipment in non working hours and non production status, and according to the preset control logic, turns off the gas source when it is waiting for production, helping terminal users save energy costs, achieve energy conservation and ESG goals, and improve the overall equipment efficiency of OEE.