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Creating "chips" innovatively and intelligently

Festo will showcase numerous innovative automation solutions and products from the semiconductor industry at the SEMICON China exhibition. Assist in the sustainable development of the semiconductor industry, open up innovative ideas, and create "chip" value. During the exhibition period from March 20th to 22nd, we look forward to your visit at booth E7816 in Hall 7 of the Shanghai New International Expo Center (Pudong).

Showcase the innovative solutions

Gate valve control solution

Application field:

The load-lock chamber/handling system/process chamber of the coating production line in the semiconductor or opto-electronic industry.

Application highlights:

  • Significantly reduce the impact force generated when opening and closing the door valve
  • Application achieves control of multiple valves in a single component
  • Achieving high repeatability accuracy through a set of digital parameters
  • Easy to track, very suitable for industrial IoT

Lift Pin control solution

Application field:

For corrugated tube cylinders used to control Lift Pin in semiconductor equipment.

Application highlights:

  • Realize precise control and monitoring of pneumatic technology in terms of running time, speed, and accuracy
  • Achieve smooth and synchronized up and down operation of the wafer, ensuring more stable travel time and reducing unexpected machine shutdowns
  • Standardize the adjustment of Lift Pin to replace manual adjustments and save maintenance time.

Cylinder synchronization control

Application field:

Wet cleaning process for semiconductor wafers

Application highlights:

  • Using 2-way customized piezoelectric valve VEAC to precisely control the synchronous movement of 2 low friction cylinders, achieving continuous adjustable speed and position during the lifting process of large-sized wafer cleaning protective bowl
  • Using an electric cylinder with protective functions to provide swing and flat feed for the cleaning nozzle

N2 Purge system

Application field:

Suitable for advanced semiconductor wafer processes that require micro pollution prevention and control in various wafer transportation and storage scenarios such as STOCKER, FOUP, OHT, and STB.

Application highlights:

  • Precision control can be achieved through flow control and humidity detection
  • The piezoelectric valve design achieves precise flow control, up to 200 liters per minute
  • Simplify engineering design, debugging, and operation, integrate module design, and provide an on-demand solution
  • Multiple MFCs can be integrated into valve islands for setup