Application: controlling and regulating cooling circuits
Your challenge: reliably regulating the coolant in semiconductor manufacturing
The solution from Festo:
- Valve terminals VTUG and VTOC (1) for reliably controlling pneumatic media valves
- Valve terminal type CPX-MPA, if additional I/Os are required, for example to control electric valves, integrate sensors or create closed-loop control circuits. With this terminal, diagnostics and remote maintenance functions can also be carried out.
- Pneumatically or electrically actuated valves type VZXA, VZQA and VZWF (3) control the media flow. Very cold and/or hot media are reliably and accurately regulated, even in closed-loop control circuits.
- The quarter turn actuator DFPD (4) actuates ball valves VZBF (5) and butterfly valves that are typically used in main lines and feed/discharge lines for cooling or temperature control media thanks to their high flow rate performance.
- Sensor types SFAW (2) and SPAW (6) measure the flow rate as well as the temperature and pressure of the media extremely accurately.
Products for the semiconductor industry
Festo has a broad product portfolio for machines used in the manufacture of electronic components: the valve terminal VTOC with integrated safety function or our proportional pressure regulators VEAA/VEAB for pilot control of media valves which are typically used to control or regulate process gases.
Festo solutions for semiconductor manufacturing
Gate valve control solution
Application area:
load-lock chamber / handling system / process chamber
Highlights of application:
- Significantly reduce the impact force generated when the door valve is switched
- The application program achieves the control of multiple valves in a single component
- High repeatability through digital parameter set
- Easy to trace - ideal for Industrial IoT
Customized solution:
In the semiconductor industry EFEM wafer transfer equipment, the application solution of the motion terminal system filling the FOUP carrier with inert gas can effectively reduce the pollution particles generated when the valve is switched.
N2 Purge system
Application area:
Application solution for advanced semiconductor wafer manufacturing processes that require micro-pollution prevention (AMC Free) in various wafer transportation and storage occasions such as STOCKER, FOUP, OHT, and STB.
Highlights of application:
- Precise humidity control through flow control and humidity detection
- Piezo valve design for precise flow control up to 200 liters per minute
- Simplify engineering design, commissioning and operation, integrated module design, ready-to-install solution
- Multi units of MFC can be integrated into a motion terminal for setup
Customized solution:
Festo pneumatic control application solutions can reduce wafer oxidation and maintain a dry state to stabilize the FOUP internal environment. In the N2 Purge system, various sensors and flow controllers are used to cooperate, and the precise proportional control of the piezoelectric valve is used to achieve accurate flow control, and data collection and transmission are realized through communication.
In addition, using the digital pneumatic technology of Festo motion terminal, not only precisely controlling the pressure/flow rate of the air knife during blowing, but also the integrated smart sensor can be used for control, diagnosis and self-learning tasks, so that the parameter combination can be optimally matched.
Lift Pin control solution
Application area:
Aimed at the corrugated cylinder used to control Lift Pin in semiconductor equipment
Highlights of application:
To achieve accurate control and monitoring of the time, speed and accuracy of pneumatic technology in operation, and to achieve a smooth and synchronous up and down operation of the wave. Standardize Lift Pin adjustments to replace previous blind adjustments and save maintenance time.
Customized solution:
- Closed-loop solution: realize advanced pneumatic control technology through VTEM, including time, acceleration and deceleration, and synchronous operation.
- Open-loop solution: use Festo customized solution, the software and hardware of the original equipment can be seamlessly upgraded without any changes.
- Precise controlled by piezo valves shortens Tack Time and increases productivity.
Cylinder synchronization control
Special gas supply and chemical polishing gas control unit
Application area:
Semiconductor (both special gas supply and chemical polishing gas control units are used in the semiconductor front-end processes)
Highlights of application:
Without the need for a power source, the gas supply to the gas cylinder can still be cut off; Adopting special OR valve design to ensure uninterrupted system control; Hot swappable function allows for the replacement of solenoid valves without the need to turn off the air supply.
Customized solution:
- Customized manual safety circuit with multi-channel control using manual valves and logic valves, while also having a more compact design.
- The specially designed manual energy storage gas cylinder switch system not only retains manual operation mode, but also can automatically shut off gas cylinders without any power source.
- A simple customized cylinder driven red indicator saves space while ensuring operational safety.
Sharing knowledge about the semiconductor industry
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