Boost your semiconductor production with perfect automation solutions for stable processes, maximum precision and minimised space requirements. As a partner to the chip and semiconductor industry, we know the challenges you face. We support you with both innovative standard components and customised solutions that are a perfect fit for your process and system. Our solutions also take into account industry standards, such as those for particle generation or outgassing.
Your challenge: reliably regulating the coolant in semiconductor manufacturing
The solution from Festo:
Festo has a broad product portfolio for machines used in the manufacture of electronic components: the valve terminal VTOC with integrated safety function or our proportional pressure regulators VEAA/VEAB for pilot control of media valves which are typically used to control or regulate process gases.
Application area:
load-lock chamber / handling system / process chamber
Highlights of application:
Customized solution:
In the semiconductor industry EFEM wafer transfer equipment, the application solution of the motion terminal system filling the FOUP carrier with inert gas can effectively reduce the pollution particles generated when the valve is switched.
Application area:
Application solution for advanced semiconductor wafer manufacturing processes that require micro-pollution prevention (AMC Free) in various wafer transportation and storage occasions such as STOCKER, FOUP, OHT, and STB.
Highlights of application:
Customized solution:
Festo pneumatic control application solutions can reduce wafer oxidation and maintain a dry state to stabilize the FOUP internal environment. In the N2 Purge system, various sensors and flow controllers are used to cooperate, and the precise proportional control of the piezoelectric valve is used to achieve accurate flow control, and data collection and transmission are realized through communication.
In addition, using the digital pneumatic technology of Festo motion terminal, not only precisely controlling the pressure/flow rate of the air knife during blowing, but also the integrated smart sensor can be used for control, diagnosis and self-learning tasks, so that the parameter combination can be optimally matched.
Application area:
Aimed at the corrugated cylinder used to control Lift Pin in semiconductor equipment
Highlights of application:
To achieve accurate control and monitoring of the time, speed and accuracy of pneumatic technology in operation, and to achieve a smooth and synchronous up and down operation of the wave. Standardize Lift Pin adjustments to replace previous blind adjustments and save maintenance time.
Customized solution:
Application area:
Semiconductor (both special gas supply and chemical polishing gas control units are used in the semiconductor front-end processes)
Highlights of application:
Without the need for a power source, the gas supply to the gas cylinder can still be cut off; Adopting special OR valve design to ensure uninterrupted system control; Hot swappable function allows for the replacement of solenoid valves without the need to turn off the air supply.
Customized solution:
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Our high-quality and easily customisable automation solutions offer innovative and competitive technologies that you can use from the front-end and the back-end to advanced packaging processes such as hybrid bonding. They are optimised to minimise contamination and work reliably to maintain your yield in the long term. Thanks to their design, you can often reduce energy costs and your carbon footprint too.
Our automation solutions ensure yields in semiconductor production are stable and thus economical. The smart design of our components also makes them very adaptable and scalable. This allows you to react quickly and easily to changing production requirements at any time.
These are the benefits that our automation solutions can offer you:
Rely on our comprehensive solutions to maintain stable and reproducible processes in the long term. Thanks to our semiconductor-specific seals and greases, you also benefit from minimised outgassing for better process sequences. We can tailor our solutions to your requirements, whether for individual temperature control, micro-positioning or precise cyclical control of the gas phases in atomic layer deposition (ALD).
Here are some examples of how we can support you:
We know how complex the challenges are that you, as semiconductor manufacturers, face. Our customised solutions together with our in-depth practical expertise and global support network will help you meet those challenges. Our experts are always on hand to help you improve the functions of your systems and minimise downtime.
You can count on us as your perfect automation partner:
Our automation solutions for the semiconductor industry are geared towards precision, energy efficiency, installation space and flexibility. Our catalogue products and specific solutions will fit seamlessly into your system exactly in line with your specifications. In addition to meeting industry standards, the cost-effectiveness of the system is also a key requirement. Our core areas include: precisely controlling cooling circuits using valve terminals and sensors, reducing nitrogen consumption with innovative piezo technology and efficiently handling wafers and chips with compact, modular handling systems. In addition, our Festo Automation Experience (Festo AX) uses artificial intelligence and data to optimise production processes and increase quality and efficiency. For specific applications, such as controlling pin lifters and supplying gas for chemical polishing processes, we offer customised solutions. This is how we help semiconductor manufacturers to reduce production costs, increase system availability and improve product quality.
Our automation solutions are aimed at the entire semiconductor industry, operators of fabs as well as OEMs of production systems and process engineers in the front-end and back-end through to advanced packaging. Developers and planners of complex systems in the electronics and microsystems technology sector also benefit from our solutions.
Our automation solutions are designed for use in systems, wafer fabrication equipment (WFE) and tools for semiconductor production as well as in sub-fabs. This includes components and systems for gas supply, cooling circuits, vacuum technology and motion solutions in cleanrooms. Our components along with our compact valve terminals, piezo technology and intelligent sensors support process stability and energy efficiency. In the sub-fab, our automated systems contribute to the reliable, space-saving and low-maintenance support of critical supply processes. A distinction can be made between catalogue products, including commodity products, with very good worldwide availability, and a customer-specific solution built to your specification.
We have many years of in-depth experience in semiconductor front-end, back-end and advanced packaging processes. A large part of our product portfolio has been developed in close cooperation with the industry in line with its requirements. The Festo customer base includes almost all renowned international fabs and OEMs. Our proven and innovative products include customised solutions for each of these production stages, from wafer processing to assembly and packaging. Thanks to our in-depth knowledge of our customers' needs and challenges, we can offer customised solutions that meet the demanding requirements for precision, cleanliness and reliability in all phases of semiconductor production.
As a dependable partner to the semiconductor industry, we not only offer automation solutions, but also engineering support, application advice and customised system solutions for specific production requirements. Another part of our support includes digital services such as condition monitoring, predictive maintenance and using AI for process optimisation. Training, worldwide technical support and fast delivery of spare parts round off our range of services.
Our cleanroom-compatible products, maximum process reliability and long service life are especially important for our customers in the semiconductor industry. If something does not go as planned, you will benefit from a quick failure analysis and investigation by Festo using modern analysis techniques. We have also implemented a comprehensive change and phase-out management system that allows us to fulfil your standard industry requirements, such as "CopyExact!" (CE!). We also offer products for cleanroom applications, which can be double-packaged on request.