Application area:
Application solution for advanced semiconductor wafer manufacturing processes that require micro-pollution prevention (AMC Free) in various wafer transportation and storage occasions such as STOCKER, FOUP, OHT, and STB.

Highlights of application:

• Precise humidity control through flow control and humidity detection
• Piezo valve design for precise flow control up to 200 liters per minute
• Simplify engineering design, commissioning and operation, integrated module design, ready-to-install solution
• Multi units of MFC can be integrated into a motion terminal for setup

Customized solution:

Festo pneumatic control application solutions can reduce wafer oxidation and maintain a dry state to stabilize the FOUP internal environment. In the N2 Purge system, various sensors and flow controllers are used to cooperate, and the precise proportional control of the piezoelectric valve is used to achieve accurate flow control, and data collection and transmission are realized through communication.

In addition, using the digital pneumatic technology of Festo motion terminal, not only precisely controlling the pressure/flow rate of the air knife during blowing, but also the integrated smart sensor can be used for control, diagnosis and self-learning tasks, so that the parameter combination can be optimally matched.

Application area:

Aimed at the corrugated cylinder used to control Lift Pin in semiconductor equipment

Highlights of application:

To achieve accurate control and monitoring of the time, speed and accuracy of pneumatic technology in operation, and to achieve a smooth and synchronous up and down operation of the wave. Standardize Lift Pin adjustments to replace previous blind adjustments and save maintenance time.

Customized solution:

• Closed-loop solution: realize advanced pneumatic control technology through VTEM, including time, acceleration and deceleration, and synchronous operation.
• Open-loop solution: use Festo customized solution, the software and hardware of the original equipment can be seamlessly upgraded without any changes.
• Precise controlled by piezo valves shortens Tack Time and increases productivity.

Application area:

Semiconductor (both special gas supply and chemical polishing gas control units are used in the semiconductor front-end processes)

Highlights of application:

Without the need for a power source, the gas supply to the gas cylinder can still be cut off; Adopting special OR valve design to ensure uninterrupted system control; Hot swappable function allows for the replacement of solenoid valves without the need to turn off the air supply.

Customized solution:

• Customized manual safety circuit with multi-channel control using manual valves and logic valves, while also having a more compact design.
• The specially designed manual energy storage gas cylinder switch system not only retains manual operation mode, but also can automatically shut off gas cylinders without any power source.
• A simple customized cylinder driven red indicator saves space while ensuring operational safety.