採用卓越的自動化解決方案完善您的半導體生產製程，在實現穩定製程和超高精度的同時，盡可能降低空間需求。 作為晶片與半導體產業的優秀合作夥伴，Festo 對企業面臨的各項挑戰瞭若指掌。我們為將您提供創新的標準元件和客製化解決方案，完美融入您的製程與系統。在顆粒產生和排氣等領域，Festo 能夠提供符合相關業界標準的解決方案。
Festo 自動化解決方案不但品質卓越，而且能夠客製化；選擇 Festo 解決方案，表示從前段製程到後段封裝，再到混合鍵合等先進封裝，都能採用富有競爭力的創新技術。 這些技術能夠有效降低污染風險，確保設備穩定可靠運行，從而長期維持良率。歸功於其結構設計，您還能有效降低能源成本並減少生態足跡。
應用領域：
半導體或光電產業之鍍膜的生產線過渡腔室 (load-lock chamber) / 移載系統 (handling system) / 製程腔體 (process chamber)
應用亮點：
訂製方案：
半導體行業 EFEM 晶圓傳送設備內，數字控制終端系統對 FOUP 載具填充惰性氣體的應用解決方案，能顯著有效降低閥門開關時產生的污染微粒。
應用領域：
適用於 STOCKER、FOUP、OHT和STB等各種晶圓輸送和儲存場合等需要微污染防治 (AMC Free) 的半導體晶片先進製程。
應用亮點：
訂製方案：
應用領域：
針對半導體設備中，用於控制 Lift Pin 的波紋管氣缸。
應用亮點：
實現氣動技術在運行的時間、速度、精度的精準控制與監測，並且達到 wafer 平穩、同步的上下運行，行程時間更穩定，減少機器意外停機。將 Lift Pin 調整標準化，取代以往的盲目調整，節省維修時間。
訂製方案：
應用領域：
半導體特殊氣體供應和化學打磨氣體控制單元，都是應用於半導體前段過程。
應用亮點：
無需動力源，仍能切斷氣體鋼瓶的氣體供應；採用特殊的或閥設計，使系統控制不中斷；熱插拔功能，無需關閉氣源即可更換電磁閥。
訂製方案：
Festo 自動化解決方案致力於為半導體產業實現穩定產量和高經濟效益。 我們的解決方案元件設計巧妙，具有極強的適應性和可擴展性。 您可以隨時根據不斷變化的生產需求，輕鬆、快速做出因應。
Festo 自動化解決方案具有下列優勢：
選擇我們的整合解決方案，讓您的流程持續穩定且具可重複性。 歸功於半導體專用密封件和潤滑脂，可以盡可能減少漏氣，實現所需的製程步驟。 無論是個別溫度控制、微米級定位，或是在原子層沉積（ALD）中精確的氣相週期控制，我們都為您開發量身打造的解決方案。
Festo 解決方案支援的應用範例：
We know how complex the challenges are that you, as semiconductor manufacturers, face. Our customised solutions together with our in-depth practical expertise and global support network will help you meet those challenges. Our experts are always on hand to help you improve the functions of your systems and minimise downtime.
You can count on us as your perfect automation partner:
Our automation solutions for the semiconductor industry are geared towards precision, energy efficiency, installation space and flexibility. Our catalogue products and specific solutions will fit seamlessly into your system exactly in line with your specifications. In addition to meeting industry standards, the cost-effectiveness of the system is also a key requirement. Our core areas include: precisely controlling cooling circuits using valve terminals and sensors, reducing nitrogen consumption with innovative piezo technology and efficiently handling wafers and chips with compact, modular handling systems. In addition, our Festo Automation Experience (Festo AX) uses artificial intelligence and data to optimise production processes and increase quality and efficiency. For specific applications, such as controlling pin lifters and supplying gas for chemical polishing processes, we offer customised solutions. This is how we help semiconductor manufacturers to reduce production costs, increase system availability and improve product quality.
Our automation solutions are aimed at the entire semiconductor industry, operators of fabs as well as OEMs of production systems and process engineers in the front-end and back-end through to advanced packaging. Developers and planners of complex systems in the electronics and microsystems technology sector also benefit from our solutions.
Our automation solutions are designed for use in systems, wafer fabrication equipment (WFE) and tools for semiconductor production as well as in sub-fabs. This includes components and systems for gas supply, cooling circuits, vacuum technology and motion solutions in cleanrooms. Our components along with our compact valve terminals, piezo technology and intelligent sensors support process stability and energy efficiency. In the sub-fab, our automated systems contribute to the reliable, space-saving and low-maintenance support of critical supply processes. A distinction can be made between catalogue products, including commodity products, with very good worldwide availability, and a customer-specific solution built to your specification.
We have many years of in-depth experience in semiconductor front-end, back-end and advanced packaging processes. A large part of our product portfolio has been developed in close cooperation with the industry in line with its requirements. The Festo customer base includes almost all renowned international fabs and OEMs. Our proven and innovative products include customised solutions for each of these production stages, from wafer processing to assembly and packaging. Thanks to our in-depth knowledge of our customers' needs and challenges, we can offer customised solutions that meet the demanding requirements for precision, cleanliness and reliability in all phases of semiconductor production.
As a dependable partner to the semiconductor industry, we not only offer automation solutions, but also engineering support, application advice and customised system solutions for specific production requirements. Another part of our support includes digital services such as condition monitoring, predictive maintenance and using AI for process optimisation. Training, worldwide technical support and fast delivery of spare parts round off our range of services.
Our cleanroom-compatible products, maximum process reliability and long service life are especially important for our customers in the semiconductor industry. If something does not go as planned, you will benefit from a quick failure analysis and investigation by Festo using modern analysis techniques. We have also implemented a comprehensive change and phase-out management system that allows us to fulfil your standard industry requirements, such as "CopyExact!" (CE!). We also offer products for cleanroom applications, which can be double-packaged on request.