Achieve precise, low-vibration wafer positioning with accuracy down to one micrometer. The system detects the force required to lift the wafer from the electrostatic chuck (ESC), helping minimize wafer walk and reduce the risk of microcracks or wafer breakage.

Reduce vibration when opening and closing gate, transfer and slit valves. The Festo motion control solution enables smooth acceleration and deceleration without impacting cycle time and can also be applied to angle valve control.

The compact VEFC mass flow controller delivers precise, stable control of inert gases in applications where space and efficiency matter. Its piezo technology provides fast response and smooth, continuous flow control while using very little power and generating minimal heat. It delivers stable gas control without the need for manual readjustment.

The VTEP proportional valve terminal combines precise pressure and vacuum control in a space-saving design. With up to 5 valves and 10 working channels, it can manage multiple functions from a single compact unit. Free of copper, nickel and zinc, VTEP is well suited for semiconductor manufacturing and other sensitive applications.

As semiconductor technology evolves, so do the skills needed to work with it. Festo Didactic helps manufacturers develop the practical, technical skills their teams need for today's semiconductor production environments.

From hands-on training and industry-recognized certification programs to train-the-trainer support and learning space planning, we can help you create a training approach that fits your workforce, facility and business needs.

Meet our training experts at SEMICON West to discuss your upskilling and workforce development needs.