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Automation in the semiconductor industry

In just 18 months, the system you set up today will have to produce chips which are twice as complex as the ones you’re making now – and sold at the same price. This only works with automated solutions that function reliably and economically. We’re well aware of how important absolute system availability is for manufacturers of semiconductors and electronic components. Which products and services do you need? Festo is there for you – worldwide.

In the production process of expensive and sensitive workpieces such as wafers, gentle and secure transport as well as reliable coating of the individual wafers are a must. Any incorrect handling within the process quickly leads to high costs. Festo offers suitable automation solutions for precision wafer handling. For example, the extremely compact 4-axis electric handling system for transporting wafers from the FOUPs all the way into the process chamber.

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Application: controlling and regulating cooling circuits

Your challenge: reliably regulate the coolant in semiconductor manufacturing

Festo’s solution:

  • Valve manifolds VTUG and VTOC (1) for reliably controlling pneumatic media valves
  • Valve manifold CPX-MPA where additional I/Os are required, for example in order to control electric pneumatic valves, integrate sensors or closed-loop control circuits. Diagnostics and remote maintenance functions can also be implemented with this manifold.
  • Pneumatic or solenoid actuated pneumatic valve types VZXA, VZQA and VZWF (3) control the flow of media. Even in closed loops, very cold and/or hot media are reliably and accurately regulated.
  • Quarter turn actuator DFPD (4) actuates ball valves VZBF (5) and flap valves, which are typically used in trunk lines and feed/discharge lines for cooling or temperature control media due to their high flow rate performance.
  • Sensor types SFAW (2) and SPAW (6) measure flow rates, as well as media temperature and pressure, very accurately.

Products for the semiconductor industry

Festo has a broad ranging product portfolio for machines for the production of electronic components: valve manifold VTOC with integrated safety function or our proportional pressure control valves VEAA/VEAB for piloting media valves as they’re typically used for controlling and regulating process gases.

Customized solutions

We understand that no two projects are the same. That's why we offer customizable solutions to meet your specific requirements. Our experienced team collaborates with you to design and engineer semiconductor solutions tailored to your needs. To learn more about our customer solutions visit Automation Systems and Solutions.

Stories from actual practice:

bdtronic YXMx handling system

Practice

Highly precise dispensing of casting resin

From car parking sensors through to smartphones and electric toothbrushes, sensitive electronic components need protection against undesirable substances. This is where special casting resins come in. The “mini-dis” desktop machine from bdtronic allows high-precision dispensing processes in a very small space – thanks, among other things, to the compact handling system YXMx from Festo.

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#Industrial robots #The electronics industry #Standard components
IPTE Industrial Robot

Practice

Getting to the point

The production of sensors for the automotive industry requires increasingly sophisticated solutions. A new machine concept developed by IPTE Factory Automation enables the fast and reliable soldering of printed circuit boards in the plastic housing. The ready-to-install industrial robot from Festo used in the concept makes cycle times of less than three seconds possible, despite a moving mass of more than 60 kg.

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#The electronics industry #Automotive Industry

Sharing knowledge concerning the semiconductor industry

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