Precise control of inert gases: the low-cost alternative
Wherever inert gases need to be precisely controlled, in particular but not only in the semiconductor industry, the mass flow controller VEFC from Festo is the right choice. The very compact VEFC expands the Controlled Pneumatics product portfolio. At the same time, it has all the advantages of piezo valves: maximum dynamic response, infinitely variable precision, very low power consumption and heating, stable flow without manual adjustment – and a very good price-performance ratio.
Economical, reliable, and precise N2 purging
A wide variety of flows can be regulated in the individual purge steps with VEFC in the load port. It ensures that only the absolutely necessary amount of nitrogen is used, whether during pre-blowing, pre-purge, process purge and post-purge. This saves nitrogen and reduces the process time until the dry shielding gas atmosphere is reached.
