Automation in the semiconductor industry

Precision and performance for optimum production throughput

Perfect your semiconductor production with ideal automation solutions – for stable processes, maximum precision, and minimized space requirements. As a partner to the chip and semiconductor industry, we know the challenges you face. We support you with innovative standard components as well as customized solutions that fit perfectly into your process and system. Our solutions take into account industry standards, such as particle generation or outgassing.

With our high-quality and easily customizable automation solutions, you can use innovative, competitive technologies from the front end to the back end and further on to advanced packaging – such as hybrid bonding. They are optimized to minimize contamination, work reliably, and thus maintain your yield in the long term. Thanks to their design, you can often reduce energy costs and your ecological footprint.

Solutions that keep your processes permanently stable and reproducible

Our automation solutions ensure a stable and therefore economical yield in semiconductor production. The smart design of our components also makes them particularly adaptable and scalable. This allows you to react quickly and easily to changing production requirements at any time.

You benefit from these advantages with our automation solutions:

  • Highly precise control of movement, pressure, and flow of media
  • Clean design for necessary cleanliness and particle emission
  • Space-saving design for compact installation environments
  • Minimized energy consumption and reduced heat development
  • AI/IoT-ready
  • Reliable worldwide availability thanks to local production and delivery
  • Compliance with the requirements of CopyExactly!
  • Personal expert support for process-specific challenges
  • Semicon-specific greases and seals to prevent unwanted outgassing

Produce with repeat accuracy and control in real time using AI

Rely on our holistic solutions to keep your processes stable and reproducible in the long term. Thanks to our semicon-specific seals and greases, you also benefit from minimized outgassing for ideal process sequences. Whether individual temperature control, micro-positioning or precise cyclical control of the gas phases in atomic layer deposition (ALD) – we develop customized solutions for you.

We support you, for example, with:

  • Temperature control for wafer chuck, process chamber or plasma generator
  • Pin lift and micropositioning with force detection
  • Valve control for atomic layer deposition (ALD)
  • Safe purging and regeneration of vacuum chambers
  • Pilot control of UHP valves for reliable control of process gases

Your benefits at a glance

We are familiar with the complex challenges faced by semiconductor manufacturers and offer tailor-made solutions. However, we also support you with in-depth practical knowledge and our global support network. Our experts help you to improve the functions of your systems and minimize downtimes at all times.

You can rely on us as your ideal automation partner:

  • High reliability for safe and consistent operation in all process steps
  • Fast response in critical situations with root cause analysis using state-of-the-art technology and risk minimization
  • Solutions that are open with regard to technology with pneumatic and electrical components
  • Consideration of the CopyExactly! standards with their own global guideline
  • Global supply chain support for a smooth production process