Perfect your semiconductor production with ideal automation solutions – for stable processes, maximum precision, and minimized space requirements. As a partner to the chip and semiconductor industry, we know the challenges you face. We support you with innovative standard components as well as customized solutions that fit perfectly into your process and system. Our solutions take into account industry standards, such as particle generation or outgassing.
With our high-quality and easily customizable automation solutions, you can use innovative, competitive technologies from the front end to the back end and further on to advanced packaging – such as hybrid bonding. They are optimized to minimize contamination, work reliably, and thus maintain your yield in the long term. Thanks to their design, you can often reduce energy costs and your ecological footprint.
Our automation solutions ensure a stable and therefore economical yield in semiconductor production. The smart design of our components also makes them particularly adaptable and scalable. This allows you to react quickly and easily to changing production requirements at any time.
You benefit from these advantages with our automation solutions:
Rely on our holistic solutions to keep your processes stable and reproducible in the long term. Thanks to our semicon-specific seals and greases, you also benefit from minimized outgassing for ideal process sequences. Whether individual temperature control, micro-positioning or precise cyclical control of the gas phases in atomic layer deposition (ALD) – we develop customized solutions for you.
We support you, for example, with:
We are familiar with the complex challenges faced by semiconductor manufacturers and offer tailor-made solutions. However, we also support you with in-depth practical knowledge and our global support network. Our experts help you to improve the functions of your systems and minimize downtimes at all times.
You can rely on us as your ideal automation partner:
Our automation solutions for the semiconductor industry are designed for precision, energy efficiency, reduced installation space, and flexibility – from catalog products to specific solutions that fit into your system exactly according to your specifications. In addition to industry standards, the cost-effectiveness of the system is a key prerequisite. Our core areas include the precise control of cooling circuits using valve manifolds and sensors, the reduction of nitrogen consumption through innovative piezo technology, and the efficient handling of wafers and chips with compact, modular handling systems. In addition, our Festo Automation Experience (Festo AX) uses artificial intelligence to enable data-based optimization of production processes in order to increase quality and efficiency. For specific applications, we offer customized solutions such as the control of pin lifters and the gas supply for chemical polishing processes. In this way, we support semiconductor manufacturers in reducing production costs, increasing system availability, and improving product quality.
Our automation solutions are aimed in particular at the entire semiconductor industry, operators of fabs as well as OEMs of production systems, and process engineers in the front end and back end through to advanced packaging. Developers and planners of complex systems in the electronics and microsystems technology sector also benefit from our solutions.
Our automation solutions are designed for use in systems, wafer fabrication equipment (WFE), and tools for semiconductor production as well as in the sub-fab. This includes components and systems for gas supply, cooling circuits, vacuum technology, and movement solutions in cleanrooms. With compact valve manifolds, piezo technology, and intelligent sensors, our components support process stability and energy efficiency. In the sub-fab, our automated systems contribute to the safe, space-saving, and low-maintenance support of critical supply processes. A distinction can be made between catalog products, including commodity products, with very good worldwide availability and a customer-specific solution built to your specification.
We have many years of extensive experience in the areas of semicon front end, back end and advanced packaging. A large part of our product portfolio has been developed in close cooperation with the industry according to your requirements. Festo's customer base includes almost all renowned international fabs and OEMs. Our proven and innovative products include customized solutions for each of these production stages – from wafer processing to assembly and packaging. Thanks to our in-depth knowledge of our customers' needs and challenges, we can offer tailor-made solutions that reliably meet the high requirements for precision, cleanliness, and reliability in all phases of semiconductor production.
As a reliable partner to the semiconductor industry, we offer engineering support, application consulting, and customized system solutions for specific production requirements in addition to our automation solutions. We also support you with digital services such as condition monitoring, predictive maintenance, and the use of AI for process optimization. Training, worldwide technical support, and fast delivery of spare parts round off our range of services.
For our customers in the semiconductor industry, our cleanroom-compatible products, maximum process reliability, and a long service life are particularly important. If something does not go as planned, you benefit from a rapid analysis of the reason for the failure, which is investigated at Festo using modern analysis methods. We have also implemented a comprehensive change and discontinuation management system that enables us to meet your standard industry requirements – such as "CopyExact!". We also offer products for cleanroom applications, which can be double-packaged on request.